Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
vi
Table of Contents
Overview of Atmospheric Robots.......................................................................................1
Wafer Handlers.............................................................................................................2
Flat Panel Display.........................................................................................................2
Top Mount and Bottom Mount.....................................................................................3
WETBOTs....................................................................................................................3
Dual-Arm Robot...........................................................................................................4
Robot Accessories............................................................................................................5
End Effectors................................................................................................................5
Laser Scanner ...............................................................................................................5
Robotic Systems...............................................................................................................6
Wafer Pre-Aligner ........................................................................................................6
Equipe Smart Controller...............................................................................................7
Track.............................................................................................................................8
Front-End System.........................................................................................................8
User Interfaces..............................................................................................................9
Regulatory Compliance....................................................................................................11
CE Mark.........................................................................................................................11
EMC and ESD Protection..............................................................................................11
Safety .............................................................................................................................12
Laser Radiation...........................................................................................................12
Emergency Stop (EMS/MOFF)..................................................................................12
Safety Interlock...........................................................................................................13
Additional Robot Safeguards......................................................................................14
Lockout/Tagout ..........................................................................................................15
Electrical Connections................................................................................................16
Robot Cables ..............................................................................................................17
Safety Labels..................................................................................................................17
High Voltage Label ....................................................................................................19
Pinch Point Label for S2-93A Systems......................................................................19
Fuse Label...................................................................................................................20
Underwriter Lab Label ...............................................................................................20
Manufacturing Labels.................................................................................................20
SEMI S2-93A Systems..................................................................................................21
Center of Gravity........................................................................................................22
Teach Pendant.............................................................................................................23
System Description ...........................................................................................................25
Equipe Smart Controller ................................................................................................25
Printed Circuit Boards................................................................................................25
Hardware Connections...................................................................................................28
Software.........................................................................................................................29
Macros ........................................................................................................................29
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