Atmospheric Pre-aligner Manual
4000-0015 Rev 1
20
Verifying Connections
To verify that all connections are correct, send the following commands.
1. Use the Vacuum Valve and Sensor Test of the Pre-aligner Diagnostics
to verify that the vacuum source is correctly connected. Pre-aligner
Diagnostics begin on page 36.
2. Send the SVON command. All servo motors in the system should turn
on. SVON also checks internal and external connections, such as
signal cable and power cable connections. If there is a problem,
SVON sends the ‘?’ prompt. In that case, refer to page 53 for
instructions on sending the STAT and ALST commands to find the
cause and solution for the problem.
3. Send the HOME command.
• For a pre-aligner only system, send HOME A to home the pre-aligner
axes. This works for both a single-axis pre-aligner or a three-axis pre-
aligner.
• For an integrated system, send HOME A to home the robot axes and
then HOME a to home the pre-aligner axes.
Preliminary Teaching
With the Pre-aligner initialized and homed, teach the desired angular
positioning of the flat or notch of the wafers.
1. Use the RWS and SWS commands to read and set the wafer size.
2. Use the RFAA and SFAA commands to read the current flat/notch
orientation setting, and set the desired flat/notch orientation setting.
In the following teaching example, the wafer size is set to 200 mm and the
angular orientation is set to 45.15°.
>RFAA Read Flatfinder Alignment Angle
9000 Angle is currently set at 90°
>RWS Read Wafer Size
150 Current Wafer Size setting is 150 mm or 6 in
>SWS 200 Set Wafer Size to 200mm
>SFAA 4515 Set Flatfinder Alignment Angle to 45.15°
>SAV SAVe new values to NVSRAM
Review the information in the chapter on operating the pre-aligner before
proceeding.
To Next Page
Loading...
