Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
47
6. With a wafer on the end effector, turn the potentiometer clockwise
until the LED is turned off. Consider this position B.
7. Turn the potentiometer to a position midway between position A and
position B.
8. Turn off the vacuum to the end effector using the EQT interface or
with the command:
OUTP 0,1
9.
If you have a dual end effector, tune the second vacuum sensor. To
turn on the vacuum, use the command OUTP 1,0. To turn off the
vacuum, use the command OUTP 1, 1.
Verifying Vacuum Sensor Connections
To test the connections, plug in the power cord. The LEDs on the face of
the controller will light:
• A green LED on indicates the +5 V
DC
power supply is functioning.
• A yellow LED blinks to indicate the CPU is running.
• A red LED light indicates an error, such as servo motors are off, I/O
board is not ready, or there is a system error.
Safety Verification
After making all connections and before teaching or operating the robotic
system, verify that all safeguards are in place. Check off the following
items as you verify them:
EMERGENCY STOP devices are functional.
Each axis moves and is restricted as intended.
All interlocks function as intended.
All safeguards are in place.
Make a visual check of the robot and maximum envelope to ensure that
conditions that might cause hazards, do not exist.
If you have an S2-93A compliant Teach Pendant, function test the
EMERGENCY STOP and motion controls to ensure proper operation.
Repair any damage or malfunction before teaching or operating the
system.
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