Strasbaugh nTellect 7AF - Teaching a Robot Only

Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
54
Teaching a Robot Only
Use a Teach Pendant or EQT interface to teach the robot stations. General
steps are given here for teaching a robot-only system. For specific
information on how to use the Teach Pendant or the EQT interface for
teaching, refer to the Equipe User Interface Manual.
For the following example steps, there are two cassette stations, Station A
and Station B, and one stage position, Station C.
1. Place the wafer on the end effector.
2. Turn off the servo motor for the T and R axes.
3. Manually adjust the robot arm to face the first slot in the cassette for
station A. Raise or lower the Z axis. Manually adjust the R axis until
the wafer is inside the first slot of the cassette.
4. Gently lower the Z-axis until the wafer is just touching the edges of
the slot.
5. Select Station A. Press Enter or Teach to save or teach Station A. For
stroke and offset parameters, you can use the defaults or try 75 and 50.
These parameters are saved in the coordinate file with the station
location and can be adjusted later.
6. Teach Station B, using the method you used for Station A.
7. To teach Station C, the stage position:
• Place the wafer on the end effector.
• Turn off the R and T servo motors.
• Manually adjust the robot arm to the stage while raising or
lowering the Z axis.
• Manually adjust the R axis until the wafer is above the stage.
Lower the Z axis until the wafer is just resting on the stage.
• Save the position, stroke, and offset for Station C.
8.
Test the station coordinates by sending several GET and PUT
instructions:
• Manually place a wafer on Station C.
•
Get the wafer from Station C.
•
Put the wafer in slot 1 of Station A.