Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
5
Robot Accessories
Robot accessories refer to attachments or options that can be removed or
exchanged easily.
End Effectors
The two standard end effectors are the horseshoe end effector and the
blade end effector.
A dual end effector has two surfaces for lifting wafers. The ends are
directly opposite each other. Equipe does not sell dual end effectors, but
does provide the software for operating them. Each end effector is defined
by a number and each taught station is assigned an end-effector number.
That is, one end effector can be used by the robot to get a wafer from a
cassette loading station while the other end effector is used to get a wafer
from a processing station.
Laser Scanner
The optional laser scanner is mounted on a robot arm to detect the
presence of wafers in cassettes. The Equipe Smart Controller (ESC) sends
information back to the host, indicating the presence, absence, or cross
slotting in each wafer position. The macros use this information to
provide automatic transfer of wafers.
The robot orients the laser scanner toward the wafer cassette and moves
the Z axis to pass the laser vertically in front of each cassette slot. As the
robot moves, the scanner emits laser pulses towards each cassette slot. A
photodetector receives any laser reflections from any wafers in the
cassette.
The amplified signal from the photodetector is digitized and passed to a
digital signal processing (DSP) unit. The DSP internal memory stores the
received signals and compares them with emitted laser pulses to generate
an OUT signal. Using the OUT signal, the controller captures the position
at which the laser hits a wafer. This is compared to the expected position
of each slot to generate a wafer map.
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