Atmospheric Pre-aligner Manual
4000-0015 Rev 1
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your file on the diskette, select the disk drive location in the same way
you select it elsewhere on an NT or Windows ’95 system.
5. Double-click on the file to select it or select the file and press the Open
button. Then press the Download button on the Download dialog.
Commands
The most often-used Pre-aligner commands are listed here. For a
complete listing of commands, refer to the Software Manual.
For axis, use t, r, z, and a for an integrated system. For a system with only
a pre-aligner, use T, R, Z, and A. The A or a indicates all pre-aligner axes.
For position parameters, list the value in mils.
Command Example Comment
HOME axis HOME r HOME the radial axis.
LMCR LMCR List all MaCRos in NVSRAM.
LMCR name LMCR HOM List all lines in one MaCRo.
MOVA axis,
position
MOVA z, 3000 MOVe Absolute. This moves the pre-aligner z
axis .3 inch from the zero (0) position.
MOVR axis,
position
MOVR t, 36000 MOVe Relative. Completes one revolution or
360º.
RES RES RESet the controller.
RFAA RFAA Read Flat Angle Alignment.
RLS RLS Read Limit Switch.
RPMO RPMO Read Pre-aligner MOde of speed. 0 is Standard
and 1 is Fast.
RPTY RPTY Read the Pre-aligner TYpe, which is either
Standard or Fast.
RWL RWL Read Wafer-Load position.
RWS RWS Read the Wafer Size.
RWU RWU Read the Wafer-Up position
SAV SAV SAVe parameters, coordinate, and calibration data
in NVSRAM.
SFAA SFAA 9000 Set Flat Angle Alignment to 90º
SPMO SPMO 1 Set Pre-aligner MOde of speed to Fast align speed.
SVON SVON a Turn ON all pre-aligner SerVo motors.
SVOF SVOF a Turn OFf all pre-aligner SerVo motors.
SWL SWL -3000 Set Wafer-Load position to .3 in below the Home
position.
SWS SWS 200 Set Wafer Size to 200 mm.
SWU SWU 200 Set Wafer-Up position to 0.02 in above the Home
position.
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