Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
7
Equipe Smart Controller
The Equipe Smart Controller (ESC) is Class 1 cleanroom-compatible.
The ESC controls the entire robotic system. The ESC provides servo
control, power supplies, an optional user interface, and diagnostics for
robots, pre-aligners, and track. The ESC and a host computer can
communicate across an RS-232 line or the ESC can run stand-alone.
The ESC can control a robot only, a pre-aligner only, or an integrated
system. An integrated system can include a track. The number of axes to
be controlled determines the model of ESC that is needed.
The CPU Board has on-board Non-Volatile Static Random Access
Memory (NVSRAM) that stores macros and critical files. Firmware is
loaded on EPROMs on the CPU board. The firmware version is
determined by specific user requirements, and is defined on the Certificate
of Compliance (COC).
If a pre-aligner is used, the ESC processes the wafer-edge image data from
the pre-aligner Charge-Coupled Device (CCD). The CCD/LED pairs
monitor the edge of the wafer during wafer alignment. The ESC CPU
board is equipped with an on-board Math Coprocessor for processing the
image data.
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