Atmospheric Pre-aligner Manual
4000-0015 Rev 1
11
Facilities Requirements
This chapter includes the environmental, electrical, mechanical, and
vacuum requirements your facility must have before installing a pre-
aligner.
Environmental
The pre-aligner is designed for cleanroom environments and conditions. It
is not intended for use in environments of explosive mixtures, corrosive
conditions, high humidity, or dust.
Environmental specifications for operation and storage are as follows:
Specification Operation Storage
Temperature
59° to 89° F (15º to 32.5º C) -4° to 104° F
(-20º to 40º C)
Relative humidity 10% to 80% Non-condensing 10% to 80% Non-
condensing
Motion (earthquake) Refer to the installation instructions.
Vacuum pressure to
the fitting
-20 in to –25 in Hg (67728 to 84660 Pa) None required.
Handling Refer to the installation instructions.
Electrical
The pre-aligner receives its power from the Equipe controller. Electrical
specifications for the controller are as follows:
Operating Specifications Tolerances
100/120 VAC @ 5 amps
220/240 VAC @ 2.5 amps
Voltage: 92 VAC to 260 VAC
Frequency: 47 Hz to 63 Hz
Mechanical
Provide a baseplate made of either 0.500+ in thick aluminum or 0.375+ in
thick stainless steel.
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