Strasbaugh nTellect 7AF - Figure 8-10 Example of a Fine Grind Recipe

Operations and Maintenance Manual Operator Functions
Version 1.2 - June 2004 8 - 45
9. Compare the values of the process parameters shown in the fine grind
recipe displayed on the screen with those provided to you by the process
supervisor:
Operator Action Explanation/Screen Display
a. Show Fine At the Show Recipe submenu, touch "Show
Fine" to display the fine grind parameters of the
recipe you selected in the steps above.
b. If the parameter values match, go on to Step 10., below.
c. If the parameter values do not match, contact your process supervisor.
Figure 8-10 Example of a Fine Grind Recipe
Step 1 Step 2 Step 3 Dwell Lift
Fine
Wheel
RPM
4000
Thickness
658 649 647 3 revs. 654 µm
Feed Wafer
Thickness
800
Feed rate
2 1.5 0.5 @ .05 µm/sec.
Tape
Thickness
0
Chuck
Speed
150 150 150 30 30 RPM
10. Hide the recipe:
Operator Action Explanation/Screen Display
• HIDE RECIPE Touch the "HIDE RECIPE" button to hide the
fine grind recipe.