Vacuum Robot Manual
4000-0315 Rev 1
11
Installing the Robot
This section describes the installation procedures, including unpacking,
placing the robot in the chamber, connecting components and external
power supplies, and leveling the system. Detailed information for
installing other components is given in corresponding documentation.
These installation procedures assure maximum earthquake protection. It is
your responsibility to ensure that the size and intended operation of the
robot system does not interfere with any other equipment in your system.
Unpacking
Your robot might be delivered by itself or installed in the transport
module. If the robot is installed in the transport module, remove the ties
that prevent the robot arm from shifting during shipping. If the robot is
shipped in a box, remove the robot from the box and save the packing
material for use when storing or shipping the robot in the future.
If the VAC514 arm and body are shipped separately, refer to installation
instructions for “Attaching the Arm to a VAC514 Robot.”
CAUTIONS: Do not handle nickel-plated robots with bare hands. Use clean
latex barrier gloves or similar gloves. An ordinary fingerprint has an outgassing
rate of about 1 x 10
-5
torr liters per second! A fingerprint will stain the finish
unless removed immediately with Isopropyl Alcohol UN1219. Never use a
water-based product with soap.
Avoid manually lifting robots over 25 lb (11 kg). The VAC400 robot weighs
about 62 lb (28 kg) and the VAC514 weighs 104 lb (48 kg). Refer to the
instructions for moving or hoisting robots in this chapter.
Never push or backdrive the arm on a VAC514 robot as this could damage the
arm.
Avoid handling a robot by the arm or Z column.
If your robot and controller are shipped separately, follow these
instructions.
1. Remove the robot from its shipping box. Remove the ESD bag(s),
which contain hardware for installation.
To Next Page
Loading...
