Vacuum Robot Manual
4000-0315 Rev 1
73
Glossary of Acronyms, Abbreviations, and Terms
accuracy. For a motion system, the difference between the actual position
and the desired position.
ac. Alternating current.
boat. In a vacuum system, a cassette inside a loadlock.
cassette module. For SEMI/MESC, a two-port module. One port is a
vacuum loadlock door that allows loading a cassette of wafers. The
second port provides access for the central handling robot to transport
wafers between the cassette and the central chamber.
Cartesian coordinates. Coordinate system with three coordinates: x, y,
and z.
CCD. Charged Couple Device. For the pre-aligner, these sensors detect
light and convert the light intensity into a digital value, units per mm
2
.
COC. Certificate of Compliance. Used by PRI to ensure that the
delivered product meets the customer requirements.
CPU. Central Processing Unit. The CPU board in the controller contains
software on the EPROM and variable files on NVSRAM. The CPU board
directs the Galil motion control board to drive the servo motors according
to the instructions from the software.
cluster tool. In a vacuum system, a chamber that feeds numerous process
chambers.
command. For the controller, a command can be called directly or from a
macro. A macro can contain several commands and/or macros. A
command cannot call a macro.
CTC. Cluster Tool Controller. Master controller that directs all
processing in the cluster.
dc. Direct current.
Dual Wafer Loadlock. A two-port module. One port is a vacuum
loadlock valve that allows loading a wafer. The second port provides
access for the central handling robot to transport wafers between the
cassette and the central chamber. Two wafers can be stored at one time.
end effector. The mechanical device at the end of the robot arm used to
pick up and carry the wafer. Also called a pan. A vacuum end effector
can be a single end effector or dual end effector.
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