Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
4
Dual-Arm Robot
The Dual-Arm Bottom-Mounted Robot (DBM) is designed for front-end
handling of wafers from 200 mm to 300 mm. Two end effectors are
mounted on two arms with independent radial movement; the vertical and
theta movement is shared. The DBM can be used in a fixed position or
bottom mounted on a track system. Options include a laser scanner, but
not a flipper or integrated pre-aligner.
Laser Scanner End Effector
The DBM is intended for dry atmospheric conditions. The amplifier board
is housed inside the robot, not in the controller. Macros that control robot
functions are customized for each application.
Although the DBM is similar to the other atmospheric robots, it is
documented in a separate manual, the Atmospheric Dual-Arm Robot
Manual, Document Number 4000-0166.
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