Atmospheric Pre-aligner Manual
4000-0015 Rev 1
33
Chuck Position
To verify that the chuck or waiting position of the pins is correct, execute
the PINC macro. From the command line in Terminal mode, enter:
PINC
The pins should be about 0.04 in (1 mm) below the wafer in this position.
If they are not, follow the instructions in the “r and z Home Offset”
Diagnostic that begins on page 44.
Unloading or Up Position
To verify that the unloading (aligning) position of the pins is correct,
execute your PINU macro. From the command line in Terminal mode,
enter:
PINU
The pins should lift the wafer above the chuck so that the wafer does not
scrape the chuck. If the wafer is not being lifted high enough, change the
wafer lifting position in the Wafer Parameter File by following these
instructions.
1. Access Terminal mode on the Teach Pendant or in EQT.
2. To read the current setting, send the command RWU.
3. Add 50 to the number from the previous step. Enter this new value
using the SWU command.
4. Execute the PINU macro. If the pin position is good, proceed to the
next step. If the new number is not large enough, go to Step 3.
5. To restore the speed and acceleration to all axes, enter either RSA a
for an integrated system or RSA A for a pre-aligner only system.
6. To save the new setting, send the command SAV.
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