Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
49
Teaching and Operating
When you teach the robot system, you save the position, or coordinates, of
the robot axes. The station position includes the Theta axis, the Z axis,
and the R axis. If the robot is installed on a track, the position includes the
track axis.
In addition, if your system is equipped with a laser scanner, you teach the
scanner positions using the same three- or four-axis components and
calibrate the laser scanner for this station.
Equipe recommends training for anyone who programs, teaches, operates,
maintains, or repairs a robot or robotic system. Equipe offers end-user
training courses that provide proper safety training to people responsible
for the safe programming, operation, or maintenance of the robot.
Before issuing any macros that initiate automated robot actions, you must
leave the restricted envelope.
Robot Axis and Station Naming Conventions
The robot incorporates a three-axis system of motion.
• T (Theta) axis controls rotation of the arm.
• R (Radial) axis controls the reaching and retracting of the arm.
• Z axis controls vertical movement of the both arms simultaneously.
When axis parameters such as speed, acceleration, or current position are
listed or modified by software commands, the parameter values for the
three axes are always listed in the order T, R, Z.
To issue commands, define each station with a one-character name or
letter. For example, the robot might get a wafer for Station A and put it in
a cassette named Station B. Station names can be any upper or lower case
letter. It is helpful to use a naming convention that suggests the function
or location of the stations. For example, all upper case station names (A to
Z) might be cassettes and all lower case station names (a to z) might be
stands.
For a cassette station, you need to teach only the first wafer slot. The
controller will use the pitch for each station to determine the distance
between slots in the cassette.