Atmospheric Pre-aligner Manual
4000-0015 Rev 1
12
Vacuum
The pre-aligner requires an external vacuum source. The pre-aligner has a
vacuum switch for the wafer chuck vacuum and a vacuum switch for the
pin vacuum. There is a vacuum sensor for the wafer chuck vacuum, but
no vacuum sensor for the pin vacuum.
It is recommended that the vacuum pressure you supply to the fitting is
between –20 and –25 in Hg (67728 to 84660 Pa).
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