Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
60
Teaching the Scanner in Special Situations
There can be instances when you cannot use the previous method. If the
preceding instructions do not work for you and one of the following
situations is true, use the information on this page:
• The cassette is mounted in a position such that the robot arm cannot
extend to a point where the sensor can touch the wafer.
• The sensor cannot reach the first slot due to an obstacle.
If the sensor cannot touch the first wafer, but can touch another wafer
in a different slot, calculate the offset using the following formula:
Z-axis Offset = 320 – [(Sn –1) * Pitch / 10]
Where:
Sn = Slot number used for teaching.
Pitch = Pitch of the cassette.
For example: If slot #3 is the lowest slot the sensor can reach and you are
using 200 mm wafers, the equation is 320 – [3 – 1) *2500 / 10] = 180. In
this case, edit parameter file line 24 to read 1, 1750, 180.
If the sensor cannot reach any wafer, but it does reach within 1.75” of a
wafer, change the offset value for the R-axis to zero. Follow the
instructions in the preceding scanning procedure with these changes:
• Measure and move the sensor to the 1.75” focal distance from the
wafers.
•
Slide out the wafer in slot #1 so you can move to the correct Z-axis
position.
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