Strasbaugh nTellect 7AF - Using the Fast Align Option

Atmospheric Pre-aligner Manual
4000-0015 Rev 1
34
Using the Fast Align Option
During initialization, the firmware detects the pre-aligner type and sets the
default speed mode based on the pre-aligner type. Speed and acceleration
for all pre-aligner axes are set based on the mode of speed. To determine
your pre-aligner type, use the RPTY command. To determine your speed
mode, use the RPMO command.
A Fast pre-aligner can run in Fast or Standard mode. To change modes,
use the SPMO command, where SPMO 1 sets the mode to Fast and SPMO
0 causes the pre-aligner to use standard aligning at Standard speed.
To use the Fast Align Option, verify the following:
• Your pre-aligner has the Fast Align Option. (RPTY)
• The speed mode is set to Fast. (SPMO 1 and RPMO)
• If you are using a PUTA macro, it is in the currently active macro file.
• The settings in your Wafer Parameter File are correct for Fast
Aligning.