Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
8
Track
The Linear Track automatically moves the robot laterally between
multiple stations that are positioned too far apart for a stationary robot.
The Galil motion control board controls the track as a single axis.
The track does not use the power supplies or amplifier boards in the ESC;
it has an integrated power supply and amplifier motor driver.
A track can be any length from 36 inches (457.2 mm) to 16 feet (4.88 mm)
in 6-inch (152-mm) increments.
Front-End System
A Front End is a self-contained wafer transfer system designed to be
directly attached to a process chamber or inspection tool. A Front-End
system typically houses a bottom-mounted robot, a pre-aligner, a linear
track, pod handlers, HEPA filter blowers, and a controller in a frame
enclosure.
A cassette tilter is an option for a Front-End system. It has two purposes:
to ensure that the wafers remain in position and to tilt the wafers to an
angle the robot can reach. The tilter can move 90 degrees and is
controlled from the host system.
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