Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
29
Software
The Equipe Smart Controller (ESC) contains the firmware on EPROMs.
The macro, coordinate, parameter, and optional pre-aligner files are stored
on NVSRAM. When your robot is delivered, the NVSRAM contains
these files with backup files supplied on a diskette. You can update the
NVSRAM files by downloading new files from the host computer or by
issuing commands to change the parameter fields and then saving the files.
The software stored on the EPROMs contains the basic commands and
logic for interpreting commands or macros sent from the Teach Pendant.
A macro is a set of commands that perform an operation on the system.
The firmware interprets and executes the macros. You can update a
macro, but you cannot update the firmware.
You can execute a macro by entering its name from the Teach Pendant or
EQT. When the robot or other component has completed (or
unsuccessfully attempted) the movement, the firmware typically sends you
a new prompt (>) or a status message.
Macros
A macro can be written to home the robot, align a wafer, get a wafer from
a station, put that wafer in a cassette, or open and close a pod door. In
addition to the macros that Equipe writes for you, you can write macros
using the Equipe macro language and commands.
You can use the same macro in different situations. A macro uses
parameter information stored in parameter files on NVSRAM. For
example, you can use the same HOM macro to home different robots
because the HOM macro uses speed and acceleration parameters stored in
each robot parameter file.
A GET macro can initiate the movement to any station and cassette slot,
because the coordinates for stations are defined and stored in a file. A
station is any location defined by a coordinate, composed of theta, radial,
and vertical vertices.
All active macros are stored in one file on NVSRAM. It is simpler to send
single line macros than a series of commands. You can use your host
computer for other tasks while the controller is interpreting and executing
your macros.
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