Vacuum Robot Manual
4000-0315 Rev 1
2
End Effectors
Equipe standard end effectors are single or dual horseshoe end effectors.
A dual end effector has two surfaces for lifting wafers. The ends are
directly opposite each other. Each end is defined by a number and each
taught station is assigned an end number. That is, one end can be used by
the robot to get a wafer from a loadlock while the other end might be used
to get a wafer from another station. These motions are not simultaneous.
Home and Limit Switches
Limit switches prevent the robot from hitting the mechanical hard stops.
A home switch is used to repeatably reset the robot mechanical coordinate
system. Software limits can be set between the hardware positive and
negative limit/home switches.
For VAC400 robots:
• The T axis has positive and negative limit switches, which also
function as home switches.
• The R axis has no limit switch, only a home switch.
• The Z axis has positive and negative limit switches, which also
function as home switches.
For VAC514 robots:
• The T axis has a negative limit switch that also serves as the home
switch.
• The R axis has no limit switch, only a home switch.
• The Z axis has positive and negative limit switches and home
switches.
Equipe Smart Controller
The Equipe Smart Controller (ESC) controls the functions of the robot and
other optional moving parts. The ESC provides servo control, power
supplies, an optional user interface, and diagnostics for robots and pre-
aligners. The ESC and a host computer can communicate across an RS-
232 line or the ESC can run stand-alone.
The ESC requires ac power. The ESC power cable and signal cables
provide all power and control signals to the robot:
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