Atmospheric Pre-aligner Manual
4000-0015 Rev 1
30
Robot Macro for Fast Align Option
The robot macro, PUTA, starts the aligning process when a wafer is put on
the pre-aligner and the robot arm is retracted only to the point where the
pre-aligner can start motion.
The PUTA macro works only for pre-aligners with the required hardware
upgrade. To determine if your pre-aligner is set for Fast Align, enter the
command RPTY to read the pre-aligner type. If a 1 is returned, the Pre-
aligner is a Fast Pre-aligner.
Your customized PUT macro is the basis for the PUTA macro. The
difference between your PUT macro and your PUTA macro are the
following lines:
RWS [R90]; Get the wafer size
R91 = -30 * R90; Calculate r-axis length for the Partial Retract
MOVR R, [R91]; Do partial retract
WMO R; Wait for r axis to complete movement
TSKM 2; Define ALIGN as task 2
ALIGN; Start alignment process
TSKK 2; End task 2
The Partial Retract of the end effector allows the aligning process to begin
sooner than if a Full Retract (RETH) is required.
Note that the computation of the r-axis length requires that the wafer size
be expressed in millimeter units.
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