Atmospheric Pre-aligner Manual
4000-0015 Rev 1
29
The macros in the first column of the table call the corresponding macros
listed in the third column. Notice that the “calling macro” contains the
RESP command. When you send the macro from the command line, you
want the prompt and use the “calling macro.” But you do not want
prompts sent to the command line if you are executing from the macro.
The “called macro” does not use the RESP command and is used in the
ALIGN macro.
Calling Macro Purpose Called Macro
MACRO CVOF
ICVOF
RESP
ENDM
Turn off the chuck vacuum. Use
this macro to turn off the chuck
vacuum just prior to picking up the
wafer.
MACRO ICVOF
INPUT L, [R15]
R15 = R15 & 254
OUTP L, [R15]
ENDM
MACRO CVON
ICVON
RESP
ENDM
Turn on the chuck vacuum.
MACRO ICVON
INPUT L, [R15]
R15 = R15 | 1
OUTP L, [R15]
ENDM
MACRO PINC
IPINC
RESP
ENDM
Move Pin to the home position.
MACRO IPINC
IPVOF
MOVA z, 0
WMO a
ENDM
MACRO PINL
IPINL
RESP
ENDM
Move pin to loading position.
(SWL RWL). This moves the pins
that raise and lower the wafer into
the proper position for the robot to
pick or place a wafer.
MACRO IPINL
IPVOF
RWL [R49]
MOVA z, [R49]
WMO a
ENDM
MACRO PINU
IPINU
RESP
ENDM
Move pin up to the ready or lifted
position (wafer on pins).
MACRO IPINU
ICVOF
RWU [R49]
MOVA z, [R49]
WMO a
ENDM
MACRO PVOF
IPVOF
RESP
ENDM
Turn off the pin vacuum.
MACRO IPVOF
INPUT L, [R15]
R15 = R15 & 253
OUTP L, [R15]
ENDM
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