Vacuum Robot Manual
4000-0315 Rev 1
5
Hardware Connections
The robot and controller comprise the basic wafer handling system. Two
cables connect the robot and the controller:
• One 50-pin, D-sub signal cable. The robot and controller send and
receive signals over the signal cable.
• One 8-pin, high-power, D-sub power cable that carries the current
from the amplifiers. The output power that drives the T, R, and Z-axis
motor to the correct position is sent from the controller to the robot.
A 25-pin male connector is available next to the 8-pin and 50-pin
connectors. The 25-pin connector is used optionally to connect to a
Vacuum Transport Module (VTM) interface.
The controller has up to three communication ports for various
communication connections:
• The optional Teach Pendant uses a 6-pin modular connection to an
RJ12 jack for connection to COM2.
• The host computer 25-pin D-sub, COM1, can connect to an RS-232
cable for host computer to controller communication. The signal cable
is connected to a DB25-pin male connector RS-232 serial port.
• An optional third communication port can be used for connection to
other equipment.
For more information about communication connections, refer to the
Equipe Software and Controller Manual.
The controller has additional external connections:
• The controller I/O board(s) provides optically isolated external inputs
and outputs. The input lines can read signals from components such as
load-lock sensors. The output lines control external devices such as a
relay of up to 50 VDC at 200 mA.
• The two power supplies are switching and linear. The switching power
supply provides power to the PC bus and the linear power supply
provides power to the amplifier modules.
To Next Page
Loading...
