Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
6
Robotic Systems
The basic robotic system is comprised of an Equipe Smart Controller
(ESC) and a robot. Other components include a pre-aligner or track. A
cassette tilter is an option on a front-end system. Details on these
components are given in other Equipe manuals; this section gives only a
brief overview.
Wafer Pre-Aligner
Wafer pre-aligners use high-resolution optical sensing (11.0 microns) to
align wafers of 3 in to 12 in (75 mm to 300 mm) without mechanical
changes or readjustments. Sensing capabilities automatically align to the
major flat or notch. Direct encoder feedback on the wafer chuck and a
linear light source provide optimum illumination of the charged couple
device (CCD) sensor.
A wafer pre-aligner can have three axes or only one axis. A three-axis
pre-aligner can rotate the wafer (Theta axis), move the wafer along a
straight line (radial axis), and raise or lower the wafer (Z axis). A one-axis
pre-aligner can rotate the wafer only in the theta direction, requiring the
robot to assist in reaching and retracting or raising and lowering the wafer.
To Next Page
Loading...
