Atmospheric Pre-aligner Manual
4000-0015 Rev 1
21
Operating a Pre-aligner
In normal operating mode, you use macros to control the pre-aligner. Use
either a PC with EQT software or the Teach Pendant to send commands
and macros. For information on using EQT 32 or the Teach Pendant, refer
to the User Interface Manual.
This chapter reviews commands and macros and when to use them.
Follow the instructions in this chapter to verify the loading, chuck
(waiting), and unloading positions before you use the pre-aligner with your
system.
Pre-aligner Files
Parameters that determine the pre-aligner behavior are stored in the Pre-
aligner Parameter File, Wafer Calibration File, and Wafer Parameter File.
File Type Extension Description
Macro .mac This file contains one or more macros.
Pre-aligner
Parameter
.par This file contains servo parameters, speed and acceleration
for homing, and other parameters needed for operating the
pre-aligner.
Wafer
Calibration
.cal Pre-aligners are factory-calibrated to optimize accuracy. The
data is stored in the Wafer Calibration file.
Wafer
Parameter
.waf The Wafer Parameter File contains information about the
Flat-finder and speeds and accelerations used during
alignment.
Pre-aligner Parameter File
The pre-aligner parameters are stored in the PRE*.par file. This file
defines the pre-aligner parameters for the controller. Below is an example
parameter file, annotated to show the line locations of the parameters.
Your parameter file might have different values.
Note that most parameters have three positions. The first position is the t-
axis value, the second position is the r-axis value, and the last position is
the z-axis value. For example, when the t axis is homed, a speed of 1000
is used, but when the z axis is homed, a speed of 200 is used.
PRE-3880 Serial number of the pre-aligner
9600 Baud rate
1000,500,200 Home speed
10000,10000,500 Home acceleration
0,0,0 Encoder resolution
0,0,0 Reserved – Not used
2997,9997,15000 Operational speed
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