Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 36 Version 1.2 - June 2004
b. Record the probe readings displayed at Points A, B, and C as shown in
Figure 11-4.
Point A ___ Point B ___ Point C ___
GOAL: The readings at Points A, B, and C should be within +/- 2
microns of each other.
Figure 11-4 Upper Spindle Probe Reading Points
A
B
C
grind wheel backing plate
with probe attached
probe path
fringe plate
front of machine
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