Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
55
Teaching a Robot and Pre-Aligner
Use a Teach Pendant or EQT interface to teach the robot and pre-aligner
stations. General steps are given here for teaching an integrated system.
For specific information on how to use the Teach Pendant or the EQT
interface for teaching, refer to the Equipe User Interface Manual.
You need your axis assignments and station names for teaching. In the
following example steps, it is assumed there are two stations: Station A is
the pre-aligner station and Station B is the cassette station.
For an integrated system, first align the wafer and teach the pre-aligner
position. If this step is not taken, the robot will try to put the aligned
wafer in the same slot as it was before the aligning. The taught positions
do not change, but the position of the wafer on the end-effector will be
different.
1. Access Teach mode.
2. Place the wafer on the chuck of the pre-aligner.
3. Turn on all servo motors.
4. Align the wafer. To align the wafer with the Teach Pendant, press
CTRL/Y. To align the wafer in EQT, select the Teach icon.
The pre-aligner aligns the wafer to the center of the chuck.
5. Turn off the servo motors for the T and R axes.
6. Manually orient the robot arm to the wafer while raising the Z axis
with the Z-axis control button. Manually adjust the R axis until the top
of the end effector is just touching the bottom of the wafer.
7.
Select the station name and save the position.
8. With the aligned wafer on the pre-aligner, turn on the servo motors for
the T and R axes.
9. Set the stroke and offset for the pre-aligner. Use the defaults, 80 and
35, and then adjust the numbers.
10.
With the aligned wafer on the end-effector, turn off the servo motors
for the T and R axes.
11. Manually orient the robot arm to the first slot in the cassette while
raising or lowering the Z axis with the Z-axis control button.
Manually adjust the R axis until the wafer is inside the first slot of the
cassette.
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