Atmospheric Pre-aligner Manual
4000-0015 Rev 1
27
Pre-aligner Macros
The most commonly used pre-aligner macros include ALIGN, CVON,
CVOF, HOM, and PINL. For an integrated system, the HOM macro
typically sends all axes in the system to the HOME position.
Note that your alignment macro might be named AL or some name other
than ALIGN.
ALIGN Align the wafer on the wafer chuck with vacuum source on.
CVON
Wafer Chuck Vacuum ON
CVOF
Wafer Chuck Vacuum Off
HOM Send to home position for r and z axes. The t axis does not
have a Home Sensor.
PINC
Move PINs to Chuck position where wafer rests on wafer
chuck with pins approximately 0.04 in (1 mm) below wafer.
PINL
Move PINs to wafer Loading position
PVOF
Pin Vacuum Off
PVON
Pin Vacuum ON
PINU
Move PINs to Unloading position until wafer is slightly above
the wafer chuck, about 0.03 in (0.75 mm). At this position,
the radial axis can center the wafer.
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