Atmospheric Pre-aligner Manual
4000-0015 Rev 1
28
Macro for Aligning
The ALIGN (or AL, BAL, or PRL) macro performs the steps to align the
wafer to the previously user-defined angular offset position. It calls a
series of macros that are listed in the table on the next page. This example
ALIGN macro might be different than your ALIGN macro.
MACRO ALIGN
R20 = 1; Set a flag for multi-tasking.
TSKM 0; Define a task for multi-tasking.
RESP a, 15; Verify that conditions are correct to proceed.
IPINC; Move pin to the chuck position.
ICVON; Turn on the chuck vacuum.
R87 = 271; Set R87 to 271 decimal.
BCOR 0, [R87]; Begin correction of offset and flat.
WMO a Wait for pre-aligner movement to end.
R87 = R87 & 271
CMP [R87], 0; Compare for error condition.
JPZ 100
IPINC; Move pin to the chuck position.
ICVON; Turn on the chuck vacuum.
R87 = 271
BCOR 0, [R87]
WMO a
LABEL 100
WAIT 50
ICVOF; Turn off the chuck vacuum.
IPINL; Move pin to the loading position.
TSKK 0; Kill the defined task.
R20 = 0; Turn off the multi-tasking flag.
ISTAR "A": Send status prefixed with the letter A.
ENDM
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