Atmospheric Pre-aligner Manual
4000-0015 Rev 1
41
• If the Limit switches remain off at all times, verify that the signal cable
and pre-aligner interface board are securely connected.
• If the Limit switches remain on at all times, unplug the signal cable. If
the limit switch then turns off, replace the limit switch assembly. If
the limit switch remains on, replace the signal cable or Galil board.
Servo Test
Run the Servo Test only after you pass the Encoder Read Test. This tests
the continuous action of the amplifier modules and the closed-loop servo
system. It automatically increases the Following Error to infinity so that
moving an axis manually does not cause the axis to servo off. You can
also use this test to decrease Torque Limit so that each axis can be easily
moved manually.
Before you move an axis, make sure the pre-aligner signal cable is
securely connected. You will test the t axis only for a PRE-050 or PRE-
350 or test all three axes for a PRE-200s or PRE-300s.
In the display, XXXX TL is the torque limit being sent to the
corresponding motor, and YYYY is the current setting for the maximum
torque limit.
You need cleanroom gloves and a large slotted screwdriver to follow this
procedure:
1. Set the torque limit (TL) for each axis to 3333 by pressing the >>> and
<<< buttons as needed.
2. To test the t axis, toggle on the t-axis servo motor.
3. With cleanroom gloves on, carefully grasp the wafer chuck and rotate
it about 1/8 of a revolution. You should feel the motor apply a smooth
and continuous counterforce. When you release the chuck, the axis
should spring back to the original position.
4. Increase Torque Limit by using the arrow keys and repeat the
preceding step.
t: XXXX
r: XXXX TL
z: XXXX YYYY
Move Axes
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