Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
2
Wafer Handlers
There are several sizes of robots for handling wafers from 75 mm (3 in) to
300 mm (12 in) in size. The arm link length determines the reach; arm
links are available in lengths from 4.25 in (107.95 mm) to 14.75 in
(374.65 mm). For an arm length of 4.25 in per link, the total reach is 8.50
in plus end-effector length.
The 100 Series Wafer Handling Atmospheric Robots are the smallest,
capable of handling loads of up to five pounds. Z-axis vertical travel
extends to 7 in. The 200 series robots have the same body as the 100
series robot, but the Z travel is 10 in. The 300 series robot is larger and
has 17 in Z travel. The 400+ series have heavy-duty bodies and longer Z
travel.
Flat Panel Display
Flat Panel Display robots are similar to the wafer-handling robots.
However, because the substrate is larger, the body must be heavy-duty.
For example, the FPD 700 series of Class 1 cleanroom-compatible, dual-
arm robots, handle flat panel displays up to 700+ mm.
Each direct-drive axis provides high-torque characteristics and eliminates
transmissions or reductions, resulting in a true zero-backlash design. The
electro-static discharge (ESD) tolerance is 21 kV.
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