Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
28
Hardware Connections
The robot and controller comprise the basic wafer handling system. Three
cables connect the robot and the controller:
•
Two 50-pin, D-sub signal cables. The robot and controller send and
receives signals over the signal cables.
• One 8-pin, high-power, D-sub power cable that carries the current to
amplifiers. The output power that drives the T, R, and Z-axis motor to
the correct position is sent from the controller to the robot.
The controller has up to three communication ports that can provide
various communication connections:
• The optional Teach Pendant uses a 6-pin modular connection to an
RJ12 jack for connection to COM1.
• The host computer 25-pin D-sub can connect to an RS-232 cable for
host computer to controller communication. The signal cable is
connected to a DB25-pin male connector RS-232 serial port.
• An optional third communication port can be used for connection to
other equipment, such as an elevator or indexer.
For more information about communication connections, refer to the
Equipe Software Manual.
The controller has additional external connections:
• The controller I/O board(s) provides optically isolated external inputs
and outputs. The input lines read signals from components such as
cassette sensors. The output lines control external devices such as a
relay of up to 50 V
DC
at 200 mA.
• The two power supplies are switching and linear. The switching power
supply provides power to the PC bus and the linear power supply
provides power to the amplifier modules.
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