Atmospheric Pre-aligner Manual
4000-0015 Rev 1
17
4. Confirm the AC power setting on the voltage selector. Unless
otherwise requested, the controller voltage is set to 120 VAC when
shipped. Your controller is factory set according to your Certificate of
Compliance (COC).
CAUTION: Setting voltage incorrectly can damage the robotic system.
5. Ensure that the power source is properly grounded. Adherence to
National Electrical Code is required.
6. With system power OFF, connect the controller AC power cable to an
AC outlet connected to the host system EMO circuit. The controller
does not have a power switch.
Connecting the Vacuum Line
Vacuum source should be 20 in. Hg minimum. For an integrated system,
connect the vacuum line to a vacuum source that is separate from the robot
vacuum system. The robot can move wafers while the pre-aligner is
aligning wafers. In normal operation, both pre-aligner and robot vacuum
valves should not open simultaneously, but this can happen when the
throughput is very fast.
1. Locate the quick-connect vacuum fitting near the Pre-aligner
connections. The vacuum fitting is sized to accommodate 1/8 in OD
hose, unless customized.
2. Connect the hose to the vacuum source.
Accessing a User Interface
Equipe recommends that each operator control station that can initiate
robot motion, has a readily accessible EMERGENCY STOP or EMO
device. This includes the Teach Pendant; the S2-93A compliant TTR 200
has a red EMS button. Or, use the EQT 32 interface on a personal
computer.
Refer to the User Interface Manual for details on using the EQT 32
interface and the Teach Pendant. You cannot use the EQT 32 interface
and the Teach Pendant simultaneously. To use EQT with the Teach
Pendant connected, return to the Equipe logo screen on the Teach Pendant.
Before connecting a Teach Pendant or installing the EQT 32 interface,
follow these instructions to ready the controller.
1. Connect the RS-232 cable to the host computer and controller.
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