Atmospheric Pre-aligner Manual
4000-0015 Rev 1
54
on last alignment alignment. Send the ALST command
to determine the specific error.
8 A macro is
running
The bit is set to 0 after the macro
executes the last ENDM command.
Send the STOP
command.
9 One or more axes
are moving
Any Move command causes Bit 9 to be
set to 1.
Send the STOP
command.
10 Servo OFF on one
or more axes
Bit 10 is set to 1 when SVOF is issued
or a motor error condition is generated.
Send SVON
command.
11 Error on COM2 There are several possible causes. Use
AST 2 command for more information.
Sending AST 2
usually clears Bit 11.
12 Not used Not used. Bit 12 is always set to 1. None
13 NVSRAM error Refer to the Software Manual.
14 Controller error Internal motion controller
communication error. The Galil board
might be damaged or the jumper
configuration is wrong.
Send another STAT.
If it does not clear
Bit 14, send RES
command.
15 Error on COM1 There are several possible causes. Use
AST 1 command for more information.
Sending AST 1
usually clears the bit.
Checking Alignment Status with the ALST Command
When Bit 7 of the STAT response is set to 1, use the ALST command to
determine the specific problem. Use the following table to interpret the
response to ALST.
Bit Meaning when set to 1
0 Wafer is not found on chuck
1 Alignment has been repeated maximum tries and failed
2 No flat or notch found
3 No offset vector found
4 Home not performed
5 Servo motor is off (use SVON or see STAT bit 10)
6 Arithmetic calculation error; attempted to divide by zero
7 Alignment used two or more cycles and failed
8 Wrong wafer size or type specification
9 Not used
10 Not used
11 Not used
12-15 Not used
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