Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
113
Glossary of Acronyms, Abbreviations, and Terms
accuracy. For a motion system, the difference between the actual position
and the desired position.
ABM. Atmospheric Bottom Mount. Atmospheric robots are used in a
normal atmosphere while vacuum robots (VAC) are used under high
vacuum. Atmospheric robots can be mounted on top of a frame or track or
below. See ATM.
ac. Alternating current.
ATM. Atmospheric Top Mount. Atmospheric robots are used in a
normal atmosphere while vacuum robots (VAC) are used under high
vacuum. Atmospheric robots can be mounted on top of a frame or track or
below. See ABM.
BOM. Bill of Materials.
cable carrier. Track structure that protects the power cables, signal
cables, and vacuum hoses. See E-chain.
cassette. A device that holds a substrate. A wafer cassette has 13 to 26
slots to hold wafers. An FPD cassette usually has less than ten slots.
Cartesian coordinates. Coordinate system with three coordinates: x, y,
and z.
CCD. Charged Couple Device. For the pre-aligner, these sensors detect
light and convert the light intensity into a digital value, units per mm
2
.
CDRH. Center for Devices and Radiological Health, a division of the US
Food and Drug Administration under the authority of the Radiation
Control for Health and Safety Act. CDRH enforces standards to limit
radiation emissions.
CE. La Communauté Européenne
CE Mark. CE Mark indicates European regulatory compliance and is
required on all products marketed in the European Community (La
Communauté Européenne). The CE Mark icon is attached to products as a
declaration of conformity. For most semiconductor equipment
manufacturers, three directives under CE Mark apply: EMC Directive,
Low Voltage Directive, and Machinery Directive. The EMC Directive
(Electromagnetic Compatibility) is an effort to prevent electrical
equipment from causing Electromagnetic Interference (EMI) with other
electrical equipment, especially to protect interference to communication
equipment. Safety directives are for electrical safety of equipment (Low
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