Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
114
Voltage Directive) and mechanical safety of equipment (Machinery
Directive).
COC. Certificate of Compliance. Used by Equipe to ensure that the
delivered product meets the customer requirements.
CPU. Central Processing Unit. The CPU board in the controller contains
software on the EPROM and variable files on NVSRAM. The CPU board
directs the Galil motion control board to drive the servo motors according
to the instructions from the software.
command. For the controller, a command can be called directly or from a
macro. A macro can contain several commands and/or macros. A
command cannot call a macro.
CTC. Cluster Tool Controller. Master controller that directs all
processing in the cluster.
dc. Direct current.
DTR/DSR. Data Terminal Ready / Data Set Ready. Modem-to-PC and
PC-to-modem communication signals.
E-chain. Electrical chain or cable carrier that protects the power cables,
signal cables, and vacuum hoses on the track assembly.
EDC. Equipe Dual Controller. The EDC can control a dual-arm robot, a
pre-aligner, a track, a flipper, or an integrated system of one or more units.
EMC. Electromagnetic Compatibility. The ability of a device, apparatus,
system, or equipment to operate in a specified environment without
exceeding specified levels of radiated or conducted EMI. Also refers to
the ability of a device, apparatus, system, or equipment to operate in the
presence of electromagnetic fields generated by external sources, such as
ESD.
EMI. Electromagnetic Interference caused by electrical noise usually in
the high frequency spectrum. EMI can be either conducted or radiated
electromagnetic energy.
EMC Directive. Electromagnetic Compatibility (EMC) Directive of La
Communauté Européenne (CE).
EMO. Emergency Machine Off. A hardware circuit that meets SEMI S2-
93A safety requirements.
end effector. The mechanical device at the end of the robot arm used to
pick up and carry the wafer.
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