Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
115
EPROM. Erasable Programmable Read Only Memory. For the Equipe
Dual Controller, EPROM chips contain the executable and any permanent
configuration files. The customer cannot edit files on an EPROM chip.
ESC. Equipe Smart Controller. The ESC can control a single-arm robot,
a pre-aligner, a track, a flipper, or an integrated system of one or more
units.
ESD. Electrostatic discharge.
find. A flat find or notch on a wafer used to orient or position the wafer.
firmware. Software that has been burned onto an EPROM chip. See
EPROM.
FPGA. Field Programmable Gate Array.
Galil board. The motion control board that determines the movement of
each axis, whether robot, pre-aligner, or track.
home. A repeatable location related to a physical datum (usually a
HOME sensor). Physical home and logical home are related in the robot
by programmed offsets. The physical home for Theta is typically 0°, R is
retracted, and Z is in the lowest position.
jog. To move incrementally.
LED. Light Emitting Diode. In the pre-aligner, an LED set is located
opposite the CCD. The CCD detects the light from the LED. The data
from this detection is used to determine the location of the edge of the
wafer.
low-level command. See command.
LVD. Low Voltage Directive (LVD), a safety directive of Conformite
Europeenne (CE).
macro. A set of commands and/or other macros. Equipe provides low-
level commands and a basic set of macros. The customer can define
additional macros by building a list of commands and/or macros.
MD. Machinery Directive (MD), a safety directive of Conformite
Europeenne (CE).
MESC. Modular Equipment Standards Committee of SEMI.
millidegree. 0.001 degrees. Theta is expressed in millidegree.
mini-environment. As defined by SEMI, a localized environment created
by an enclosure to isolate the product from contamination and people.
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