Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
116
MTBF. Mean Time Between Failures
MTTR. Mean Time To Repair
NVSRAM. Non-Volatile Static Random Access Memory. NVSRAM
chips in the controller have a battery backup so that configuration files are
not lost in case of a power loss.
offset. The station property that sets the limit on vertical travel. That is,
the end effector uses this vertical distance when extending into the cassette
for a GET or when extending for a PUT.
PCB. Printed Circuit Board.
pitch. The station property that defines the distance between two slots in
the cassette. This number, together with the slot number and the taught Z
position, determines the Z coordinate of the location of a requested wafer.
polar coordinates. Coordinate system with three coordinates: The angle
theta, the distance or magnitude r, and the z coordinate for height.
repeatability. Ability to return to a given, or taught, coordinate.
RFI. Radio Frequency Interference.
RTS/CTS. Request to Send / Clear to Send. These communication
protocols determine the direction of data flow.
SCARA. Selectively Compliant Assembly Robotic Arm. A robotic
manipulator with three parallel revolute joints allowing it to move and
orient in a plane with a fourth prismatic joint for moving the end effector
normal to the plane.
servo motor. Motor with a feedback loop. The axis is connected to an
encoder that counts units traveled and sends this value back to the
controller.
SEMI. Semiconductor Equipment and Materials International, a
standards organization based in California and tasked with the generation
and compilation of standards related to the semiconductor industry.
SEMI S2. SEMI standards carry an “S” designation and a “dash year”
designation indicating the particular last revision of the specification.
S2-93A is related to safety elements of systems.
SMIF. Standard Mechanical Interface, as defined by SEMI. Relates to a
system of closed PODS used to transport 200mm wafers cleanly.
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