Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
117
stepper motor. Motor driven by providing a series of pulses to various
windings in the motor. Stepper motors are typically driven in fixed
increments (or steps) of motion, related to the physical construction of the
motor. Stepper motors are frequently used without a feedback loop in
motion systems. In such a system, the absolute position is calculated by
counting the number of steps the motor has made since it was homed.
stroke. The station property that is the total vertical distance used in
getting or putting a substrate. The total vertical distance traveled inside a
cassette during a GET or PUT. This distance is usually twice the value of
the offset.
substrate. For Equipe, the material being transferred, usually a wafer or
flat panel display.
TOTS. Time Optimized Trajectory Software. Improves throughput by
overlapping motions. Increases performance without increasing speed by
combining motions. Axes are moved simultaneously when the wafer is
clear of obstacles.
TOT. Time Optimized Trajectory. Software that allows multiple axes to
move at the same time without hitting obstacles. The motion is smoother
and the throughput has been increased up to 35%.
UART. Universal Asynchronous Receiver-Transmitter. For a serial port.
Equipe controllers use 16C450 UART.
VAC. VACuum or Volts AC.
wafer carrier. Any cassette, box, pod or boat that contains wafers, as
defined by SEMI.
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