Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
50
Commands and Macros for Robots
You operate the robot directly with commands or macros. The commands
are documented in the Equipe Software Manual. Except for a few
standard macros, macros are system-specific. To review your macros, use
any text editor to view the macro file (*.mac) delivered on diskette with
your system.
To send a command or macro, type the command or macro name at the
Terminal mode prompt and press the Enter key. For example, to turn on
the servo motor for the Z axis, enter:
SVON Z
Here’s a short list of useful commands and macros. For axis, use the robot
(T, R, Z), pre-aligner (t, r, z), track axis (t or W), or A, where A is all robot
axes. For position parameters, list the value in mils.
Command or Macro Example Comment
LMCR LMCR Lists all macros in NVSRAM.
LMCR name LMCR HOM Lists all lines in one macro.
MOVA axis, position MOVA z, 6000 Move absolute. This moves the robot
6 inches from the zero (0) position.
MOVR axis, position MOVR z, 900 Move relative. Moves the specified
distance from the current position.
STOP axis STOP A Stop all movement.
SVON axis SVON A Turn on the servo motors for all axes.
SVOF axis SVOF Z Turn off the servo motor for the Z
axis.
Coordinate File
The coordinate file contains the coordinates for positions or stations and
cassette slot information. You can add more stations to the coordinate file
or change the coordinates of the existing stations. That is, you place the
robot in a position or station that you want the robot to remember. You
then teach the station coordinates by saving the coordinates for that
position or station in a coordinate file (*.cor) stored in NVSRAM.
For stations that are cassettes, you teach the location of the first slot in
three coordinates, and the pitch, or distance between each slot. From that,
the controller calculates the coordinates for any slot in the cassette. Thus,
when you issue macro GET A, 9 the robot moves to the coordinate
position of Station A and gets the wafer from the ninth slot.
The following annotated coordinate file has stations named A, B, and C.
You can define up to 52 stations, named A through Z and a through z. In