Atmospheric Pre-aligner Manual
4000-0015 Rev 1
2
• The theta axis rotates the wafer chuck to align the flat or notch to the
programmed orientation. The pre-aligner automatically detects if the
wafer being aligned has a notch or a flat.
• The radial axis shifts the wafer laterally to center the wafer.
A single-axis pre-aligner has no pins and relies on the robot radius (R) and
vertical (Z) axes to lift and translate the wafer. The controller for a single-
axis pre-aligner does not have a Pre-aligner Amplifier Board as a single
AMC driver unit is used.
Wafer Sizes
Equipe pre-aligners accommodate all current SEMI standard wafer sizes:
• The PRE-050, PRE-200, and PRE-201 Pre-aligners are designed for 3
in (76 mm) to 8 in (200 mm) wafers.
• The PRE-300, PRE 301, and PRE-350 handle 8 in (200 mm) and 12 in
(300 mm) wafers with an option for aligning 6 in (150 mm) wafers.
Changing wafer size requires only that you enter the new size with the
SWS software command. No mechanical modifications or
adjustments are required.
Pin Loading and Chuck Loading
Pin length and type of robot end effector determine whether a pre-aligner
is pin loading or chuck loading. Equipe pre-aligners work with either a
Horseshoe End-Effector or a Blade End-Effector:
• With a Horseshoe End-Effector, the wafer is loaded directly onto the
wafer chuck. Using a Horseshoe End-Effector is faster because time is
not required to raise and lower the transfer pins while loading. If the
pre-aligner has pins, they are short pins.
• With a Blade End-Effector, the wafer is loaded on the pins. The end
effector then retracts and the pins lower until the wafer is on the chuck.
Blade End Effectors are durable and have a low relative mass, but are
slower than the Horseshoe End Effector. The pins are long pins.
The PRE-201 and PRE-301 are pin loaders. The PRE-050 and PRE-350
have no pins and are chuck loaders. The PRE-200 and PRE-300 are chuck
loaders.
Note that the type of loading for the PRE-300 and PRE-301 is determined
by a software setting. That is, if you have a chuck loading PRE-300, you
can change it to a pin loader by resetting the pin length with the SWL
command, as instructed on page 32.
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