Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
30
Coordinate File
The coordinate, or station, file contains the T-R-Z coordinates for stations
and cassette slot information. You can add more stations to the coordinate
file or change the coordinates of the existing stations. That is, you place
the robot in a position or station that you want the robot to remember.
You then teach the station coordinates by saving the coordinates for that
position or station in a coordinate file (*.cor) stored in NVSRAM.
To teach the robot to find a slot in a cassette, teach the location of the first
slot in three coordinates, and the pitch, or distance between each slot. The
controller then calculates the coordinates for any slot. Thus, when you
issue GET A, 9, the robot moves to the coordinate position of Station A
and gets the wafer from the ninth slot.
Robot Parameter File
The robot parameters are stored in the ATMxxxx.par file or ABMxxxx.par
file, where xxxx is the four-digit serial number. This file defines the robot
parameters for the controller. The parameter file that is delivered with
your robot contains parameters set for your particular robot and
application. You will not need to change them unless you have special
circumstances. In that case, you can use commands to change the
parameters or you can edit the parameter file.
Moving and Homing a Robot Axis
The range of travel of each axis is physically limited by mechanical hard
stops and, with the exception of the arm axes, is electronically guarded by
two limit switches. The negative and positive limit switches are located
within the full travel of the hard stops. The negative limit switch is also
the home switch for the Theta and Z-axes. The R axis has one limit
switch, the negative limit or home switch.
A DC servo motor, a servo driver or amplifier, and a motion control board
control the robot axis. The servo motor is directly connected to an optical
encoder. The encoder and limit switch signals are input to the Galil
motion control board.
The Galil motion control board monitors the motor position by reading the
optical encoder and outputs a signal that controls the servo amplifier
current. The amplifier module amplifies the signal and sends the power to
the motor. The encoder on the motor provides feedback to the motion
control board to create the next output signal.
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