Atmospheric Single-Arm Robot Manual
4000-0016 Rev A
56
12.
Gently lower the Z-axis until the wafer is just resting on the edges of
the slot.
13. Select Station B. Press Enter or Teach to save the coordinates for
Station B, the cassette station.
14.
Set the stroke and offset for Station B. Use the defaults. For most
wafer sizes, the defaults are 75 and 50. Adjust the defaults as
necessary.
15. With the aligned wafer still on the end-effector, manually move the
robot arm out of the cassette.
16. Turn on the servo motors for the T and R axes.
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