Atmospheric Pre-aligner Manual
4000-0015 Rev 1
31
Here is an example of an entire PUTA macro.
MACRO PUTA #C60, #R1
TSKM 1; Set this macro as task #1
R21 = 1; Set R21 to 1
RESP A,15; Check if condition allows moving robot axes
INDEX [C60], [R1]; Set Index
MTCR [C60], 1, 0; Move axes to in front of station and extend
RSEE [C60], [R35]; Read EE#
WMO A; Wait for all robot motion to complete
SSP Z, 300; Set speed to slow
SAD Z, 300
SDL Z, 300
STROK [C60], 1; Stroke Z down
OUTP [R35], 1; Turn off vacuum
WMO Z; Wait until Z stops
RSA Z; Restore Z speed
WVAC [R35], 1, 5; Wait
RWS [R90]; Get the wafer size
R91 = -30 * R90; Calculate r-axis length for the Partial Retract
MOVR R, [R91]; Do partial retract
WMO R; Wait for r axis to complete movement
TSKM 2; Define ALIGN as task 2
ALIGN; Start alignment process
TSKK 2; Kill task 2
RETH; Retract R axis
WMO R; Wait
TSKK 1; Kill task 1
R21 = 0; Set flag to 0
? D, "P"; Send status
ISTAR
ENDM
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