Vacuum Robot Manual
4000-0315 Rev 1
74
EPROM. Erasable Programmable Read Only Memory. For the
controller, EPROM chips contain the executable and any permanent
configuration files. The customer cannot edit files on an EPROM chip.
ESC. Equipe Smart Controller. The ESC can control a robot, a pre-
aligner, a track, a flipper, or an integrated system of units.
ESD. Electrostatic discharge.
ESD/RFI shielding.
FEC. Front End Controller. Controller that directs the Front End system
through the wafer handling operations.
Ferrofluidic type seals. In VTM, the seal between the vacuum and
atmospheric systems.
FFU. For front-end loader, fan filter unit.
find. A flat find or notch on a wafer used to orient or position the wafer.
firmware. Software that has been burned onto an EPROM chip. See
EPROM.
FIXLOAD. A brand name for a pod door.
FOUP. Front Opening Unified Pod.
following error. Tolerance or limit on difference allowed between the
actual position and the commanded position of an axis.
FPD. Flat Panel Display. Equipe robots either handle wafers or flat panel
displays.
FPGA. Field Programmable Gate Array.
Galil board. The motion control board that determines the movement of
each axis, whether robot, pre-aligner, or track.
HATOT. Hybrid Automated Time Optimized Trajectory
HEPA filter. For front-end loader, the high efficiency particle air filter in
the fan filter unit (FFU).
home. A repeatable location related to a physical datum (usually a
HOME sensor). Physical home and logical home are related in the robot
by programmed offsets. The physical home for Theta is typically 0°, R is
retracted, and Z is in the lowest position.
To Next Page
Loading...
