Vacuum Robot Manual
4000-0315 Rev 1
75
isolation valve. Mechanical component used at an interface plane to
permit environmental isolation between the Transport Module and an
attached module. Isolation valves are controlled by the Transport Module
Controller (TMC).
jog. To move incrementally.
LED. Light Emitting Diode. In the pre-aligner, an LED set is located
opposite the CCD. The CCD detects the light from the LED. The data
from this detection is used to determine the location of the edge of the
wafer.
load port. Transfer location between any carrier transport system and the
wafer handling system controlled locally by the processing equipment.
low-level command. See command.
LVD. Low Voltage Directive (LVD), a safety directive of Conformite
Europeenne (CE).
mA. Milliampere.
macro. A set of commands and/or other macros. Equipe provides low-
level commands and a basic set of macros. The customer can define
additional macros by building a list of commands and/or macros.
MD. Machinery Directive (MD), a safety directive of Conformite
Europeenne (CE).
MESC. Modular Equipment Standards Committee of SEMI.
millidegree. 0.001 degrees. Theta is expressed in millidegree.
mini-environment. As defined by SEMI, a localized environment created
by an enclosure to isolate the product from contamination and people.
MTBF. Mean Time Between Failures
MTTR. Mean Time To Repair
notch. Wedge or cutout used to orient or position the wafer.
NVSRAM. Non-Volatile Static Random Access Memory. NVSRAM
chips in the controller have a battery backup so that configuration files are
not lost in case of a power loss.
offset. The station property that sets the limit on vertical travel. That is,
the end effector uses this vertical distance when extending into the cassette
for a GET or when extending for a PUT.
PCB. Printed Circuit Board.
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