Strasbaugh nTellect 7AF - Page 176

Strasbaugh nTellect (Model 7AF) Wafer Grinder
8 - 44 Version 1.2 - June 2004
COMPARE THE STORED RECIPE VALUES WITH THE PARAMETER VALUES RECEIVED FROM
THE PROCESS SUPERVISOR
Operator Action Explanation/Screen Display
7. SHOW RECIPE Touch the "SHOW RECIPE" button to display
the coarse grind parameters of the recipe you
selected in the steps above.
Figure 8-9 Example of a Coarse Grind Recipe
Step 1 Step 2 Step 3 Dwell Lift
Coarse
Wheel
RPM
1875
Thickness
683 673 667 10 revs. 673 µm
Feed Wafer
Thickness
800
Feed rate
8 2 1 @ 5 µm/sec.
Tape
Thickness
0
Chuck
Speed
150 150 150 150 150 RPM
8. Compare the values of the process parameters shown in the recipe
displayed on the screen with those provided to you by the process
supervisor:
a. If the parameter values match, go on to Step 9., below.
b. If the parameter values do not match, contact your process supervisor.