Strasbaugh nTellect (Model 7AF) Wafer Grinder
8 - 46 Version 1.2 - June 2004
PREPARE THE CASSETTES AND START THE CYCLE
11. Load the wafers in a cassette(s) tape side up with the flat of each aligned to
the rear of the cassette.
12. Rotate a send turret away from the robot and place the cassette on it:
Operator Action Explanation/Screen Display
a. Send cassette
icon Touch the desired "Send" cassette icon to rotate
the turret 180 °.
b. Place the cassette containing the wafers to be processed on a send
turret, centering it on the turret and seating it firmly within the notches
(guides).
13. Rotate the turret to present the cassette to the robot:
Operator Action Explanation/Screen Display
• Send 1 cassette
icon Touch the "Send 1" cassette icon to rotate the
turret 180 °.
14. To prepare to process a second cassette of wafers, repeat Steps 11.
through 13., immediately above.
To Next Page
Loading...
