Atmospheric Pre-aligner Manual
4000-0015 Rev 1
60
EMC Directive. Electromagnetic Compatibility (EMC) Directive of La
Communauté Européenne (CE).
end effector. The mechanical device at the end of the robot arm used to
pick up and carry the wafer.
EPROM. Erasable Programmable Read Only Memory. For the
controller, EPROM chips contain the executable and any permanent
configuration files. The customer cannot edit files on an EPROM chip.
ESC. Equipe Smart Controller. The ESC can control a robot, a pre-
aligner, a track, a flipper, or an integrated system of units.
ESD. Electrostatic discharge.
find. A flat find or notch on a wafer used to orient or position the wafer.
firmware. Software that has been burned onto an EPROM chip. See
EPROM.
following error. Tolerance or limit on difference allowed between the
actual position and the commanded position of an axis.
Galil board. The motion control board that determines the movement of
each axis, whether robot, pre-aligner, or track.
home. A repeatable location related to a physical datum (usually a HOME
sensor). Physical home and logical home are related in the robot by
programmed offsets. The physical home for Theta is typically 0°, R is
retracted, and Z is in the lowest position.
jog. To move incrementally.
LED. Light Emitting Diode. In the pre-aligner, an LED set is located
opposite the CCD. The CCD detects the light from the LED. The data
from this detection is used to determine the location of the edge of the
wafer.
low-level command. See command.
LVD. Low Voltage Directive (LVD), a safety directive of La
Communauté Européenne (CE).
macro. A set of commands and/or other macros. Equipe provides low-
level commands and a basic set of macros. The customer can define
additional macros by building a list of commands and/or macros.
MD. Machinery Directive (MD), a safety directive of La Communauté
Européenne (CE).
millidegree. 0.001 degrees. Theta is expressed in millidegree.
NVSRAM. Non-Volatile Static Random Access Memory. NVSRAM
chips in the controller have a battery backup so that configuration files are
not lost in case of a power loss.
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