Atmospheric Pre-aligner Manual
4000-0015 Rev 1
61
offset. The station property that sets the limit on vertical travel. That is,
the end effector uses this vertical distance when extending into the cassette
for a GET or when extending for a PUT.
PCB. Printed Circuit Board.
pitch. The station property that defines the distance between two slots in
the cassette. This number, together with the slot number and the taught Z
position, determines the Z coordinate of the location of a requested wafer.
polar coordinates. Coordinate system with three coordinates: The angle
theta, the distance or magnitude r, and the z coordinate for height.
repeatability. Ability to return to a given, or taught, coordinate.
servo motor. Motor with a feedback loop. The axis is connected to an
encoder that counts units traveled and sends this value back to the
controller.
SEMI. Semiconductor Equipment and Materials International, a standards
organization based in California and tasked with the generation and
compilation of standards related to the semiconductor industry.
SEMI S2. SEMI standards carry an “S” designation and a “dash year”
designation indicating the particular last revision of the specification.
S2-93A is related to safety elements of systems.
stroke. The station property that is the total vertical distance used in
getting or putting a substrate. The total vertical distance traveled inside a
cassette during a GET or PUT. This distance is usually twice the value of
the offset.
substrate. For Equipe, the material being transferred, usually a wafer.
UART. Universal Asynchronous Receiver-Transmitter. For a serial port,
Equipe controllers use 16C450 UART.
VAC. VACuum or Volts AC.
wafer carrier. Any cassette, box, pod or boat that contains wafers, as
defined by SEMI.
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